Graphite formation in diamond film deposition
Authors:
- W. ZhuWZW. Zhu
- C. A. RandallCRC. A. Randall
- A. R. BadzianABA. R. Badzian
- R. MessierRMR. Messier
- 1 May 1989
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 7 (3) , 2315-2324