Submicron electrical current density imaging of embedded microstructures
Authors:
- 12 May 2003
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 82 (19) , 3272-3274
Abstract
We have developed a scanning magnetic microscopy technique for noninvasively imaging submicron magnetic fields from embedded microscopic electrical circuits. We are able to extract from the field data a complete profile of current densities using a mathematical algorithm. As an example, we provide current density images of micron-scale passivated conductors undergoing electromigration.Keywords
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