High-energy x-ray reflectivity of buried interfaces created by wafer bonding
Authors:
- F. RieutordFRF. Rieutord
- J. EymeryJEJ. Eymery
- F. FournelF. Fournel
- D. ButtardDBD. Buttard
- R. OeserROR. Oeser
- O. PlantevinOPO. Plantevin
- H. MoriceauHMH. Moriceau
- B. AsparBAB. Aspar
- 13 March 2001
- journal article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 63 (12)
Abstract
No abstract availableKeywords
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