Two-dimensional PIC–MCC simulations of a capacitively coupled radio frequency discharge in methane
Authors:
- A L AlexandrovAAA L Alexandrov
- I V SchweigertISI V Schweigert
- 12 February 2005
- journal article
- Published by IOP Publishing in Plasma Sources Science and Technology
- Vol. 14 (2) , 209-218
Abstract
No abstract availableKeywords
All Related Versions
This publication has 27 references indexed in Scilit:
- Effects of design and operating variables on process characteristics in a methane discharge: a numerical studyPlasma Sources Science and Technology, 2001
- Effects of reactor pressure on two-dimensional radio-frequency methane plasma: a numerical studyPlasma Sources Science and Technology, 1999
- Two-dimensional radio-frequency methane plasma simulation: comparison with experimentsIEEE Transactions on Plasma Science, 1999
- A Synthetic Approach to RF Plasma Modeling Verified by Experiments: Demonstration of a Predictive and Complete Plasma SimulatorJapanese Journal of Applied Physics, 1997
- RF Plasmas in Methane: Prediction of Plasma Properties and Neutral Radical Densities with Combined Gas-Phase Physics and Chemistry ModelJapanese Journal of Applied Physics, 1995
- Radio-frequency glow discharges in methane gas: modelling of the gas-phase physics and chemistryJournal of Physics D: Applied Physics, 1994
- Appearance mass spectrometry of neutral radicals in radio frequency plasmasJournal of Vacuum Science & Technology A, 1992
- Computer simulation of a carbon-deposition plasma in CH/sub 4/IEEE Transactions on Plasma Science, 1991
- Spatial distribution of CH3 and CH2 radicals in a methane rf dischargeApplied Physics Letters, 1990
- Diagnostics and modelling of a methane plasma used in the chemical vapour deposition of amorphous carbon filmsJournal of Physics D: Applied Physics, 1984