Extended defects in shallow implants

Authors:

ACA. Claverie
A. Claverie

Publisher website

1 May 2003

journal article
research article
Published by Springer Nature in Applied Physics A

Vol. 76 (7) , 1025-1033
DOI:10.1007/s00339-002-1944-0

Abstract

No abstract available

Keywords

Cited by 133 articles