Modelling of the mechanical behaviour of a differential capacitor acceleration sensor
Author:
- 1 May 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 48 (2) , 101-108
Abstract
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This publication has 1 reference indexed in Scilit:
- A surface micromachined silicon accelerometer with on-chip detection circuitrySensors and Actuators A: Physical, 1994