Space-charge-limited current in thin-film diamond
Authors:
- 23 March 1987
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 50 (12) , 763-765
Abstract
The electrical conduction in thin‐film diamond synthesized by microwave plasma enhanced chemical vapor deposition has been studied with metal‐diamond‐silicon metal‐insulator‐semiconductor structures. Measurements over a wide temperature range provide evidence for space‐charge‐limited current in the presence of traps. An exponential distribution of traps with a peak value of the order of 3×1020 cm−3 eV−1 has been deduced from the current‐voltage‐temperature data.Keywords
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