Thin-film field-effect transistors based on La-doped SrTiO3 heterostructures
Authors:
- 1 March 2004
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 84 (9) , 1573-1575
Abstract
Field-effect transistors have been fabricated from epitaxialperovskitestrontiumtitanateheterostructures. Lanthanum-doped SrTiO 3 was used as the semiconducting channel while insulating SrTiO 3 was used as a gate insulator. Both depletion and accumulation effects in the channel have been studied from 300 to 4 K. Hall effect measurements indicate a temperature independent n -type carrier density around 5×10 19 cm −3 . At 300 K, typical mobilities are 2–3 cm 2 V −1 s −1 while low temperaturemobilities are as high as 15 cm 2 V −1 s −1 .Keywords
This publication has 8 references indexed in Scilit:
- Hot-carrier-induced degradation in short p-channel nonhydrogenated polysilicon thin-film transistorsIEEE Transactions on Electron Devices, 2002
- Electrical properties of La-doped strontium titanate thin filmsApplied Physics Letters, 2002
- Organic thin-film transistors: A review of recent advancesIBM Journal of Research and Development, 2001
- Electric field controllable Josephson junctions of high quality in high-T c superconductorsApplied Physics Letters, 1996
- Dielectric properties of sputteredfilmsPhysical Review B, 1994
- Filling dependence of electronic properties on the verge of metal–Mott-insulator transition inPhysical Review Letters, 1993
- Optical Properties and Band Structure of SrTiand BaTiPhysical Review B, 1965
- Dependence of the Superconducting Transition Temperature on Carrier Concentration in Semiconducting SrTiPhysical Review Letters, 1965