Combined impact of 500 keV protons and oxygen plasma on polyimide films
Authors:
- L.S. NovikovLNL.S. Novikov
- E.N. VoroninaEVE.N. Voronina
- V.N. ChernikVCV.N. Chernik
- L.A. ZhilyakovLZL.A. Zhilyakov
- N.P. ChirskayaNCN.P. Chirskaya
- 1 November 2017
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 410, 60-67
Abstract
No abstract availableThis publication has 18 references indexed in Scilit:
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