Aluminium nitride films made by low pressure chemical vapour deposition: Preparation and properties
Authors:
- Y.G. RomanYRY.G. Roman
- A.P.M. AdriaansenAAA.P.M. Adriaansen
- 1 February 1989
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 169 (2) , 241-248
Abstract
No abstract availableKeywords
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