Silica sputtering by noble gas projectiles: elucidating the effect of cluster species with molecular dynamic simulation

Authors:

NKN. G. Korobeishchikov
N. G. Korobeishchikov

Publisher website

21 September 2022

journal article
research article
Published by Springer Nature in Plasma Chemistry and Plasma Processing

Vol. 42 (6) , 1223-1235
DOI:10.1007/s11090-022-10286-8

Abstract

No abstract available

Keywords

This publication has 44 references indexed in Scilit:

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