Methodical tuning of NH3 gas sensing in WO3 thin films by electron beam irradiation
Authors:
Open Access
- 10 February 2024
- journal article
- research article
- Published by Springer Nature in Journal of Materials Science: Materials in Electronics
- Vol. 35 (5) , 1-14
Abstract
The present work focuses on the structure, morphology, optical and sensing analysis of Electron Beam Irradiation (EBI) treated WO3 films synthesized by the spray pyrolysis technique. X-ray diffraction (XRD) revealed a slight shift in the 2θ position, indicating stress generated due to EBI process. Scanning Electron Microscopy (SEM) morphographs presented well-defined grains at higher irradiation dosages. X-ray Photoelectron Spectroscopy (XPS) studies showed increased oxygen vacancy defects for the 5 kGy treated sample compared to unirradiated WO3. Sensing analysis of unirradiated and EBI-treated films was conducted towards ammonia (NH3) at an optimum operating temperature of 200 °C. Sensor response of 5 kGy treated film increased by − 4.5 fold compared to unirradiated film at 5 ppm NH3 concentration. The current study demonstrates the importance of EBI in tailoring the NH3 sensing properties of WO3 films.Keywords
Funding Information
- Manipal Academy of Higher Education (MAHE/DREG/PhD/IMF/2019)
- Manipal Academy of Higher Education, Manipal
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