Advanced surface polishing using gas cluster ion beams
Authors:
- Z. InsepovZIZ. Insepov
- A. HassaneinAHA. Hassanein
- J. NoremJNJ. Norem
- D.R. SwensonDSD.R. Swenson
- 1 August 2007
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 261 (1-2) , 664-668
Abstract
No abstract availableKeywords
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