The effect of the recess shape on performance analysis of the gas-lubricated bearing in optical lithography
Authors:
- Xue-Dong ChenXCXue-Dong Chen
- Xue-Ming HeXHXue-Ming He
- 1 November 2006
- journal article
- Published by Elsevier in Tribology International
- Vol. 39 (11) , 1336-1341
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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