The effect of deposition parameters and substrate surface condition on texture, morphology and stress in magnetron-sputter-deposited Cu thin films
Authors:
- B. OkoloBOB. Okolo
- P. LamparterPLP. Lamparter
- U. WelzelUWU. Welzel
- T. WagnerTWT. Wagner
- E.J. MittemeijerEME.J. Mittemeijer
- 1 March 2005
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 474 (1-2) , 50-63
Abstract
No abstract availableKeywords
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