Alternatives to reduce perfluorinated compound (PFC) emissions from semiconductor dielectric etch processes: meeting environmental commitments while minimizing costs
Authors:
- N. KrishnanNKN. Krishnan
- R. SmatiRSR. Smati
- S. RaouxSRS. Raoux
- D. DornfeldDDD. Dornfeld
- 4 November 2003
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 23 6, 19-24
Abstract
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