Indium-Tin Oxide Thin Films Prepared by Thermal Decomposition of Metallic Complex Salts

Authors:
  • TMToshiro Maruyama
    Toshiro Maruyama
  • AKAkira Kojima
    Akira Kojima
Publisher website
Google Scholar
Abstract
Transparent conductive indium-tin oxide thin films were prepared by thermal decomposition of metallic complex salts. The films of high transparency and low electric resistivity (4.23×10-4 Ω·cm) were obtained by dip coating glass substrates with raw-material solution followed by heating at 500°C for 20 min in an inert atmosphere.