Polysilicon angular microvibromotors
Authors:
- A.P. LeeALA.P. Lee
- A.P. PisanoAPA.P. Pisano
- 1 June 1992
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 1 (2) , 70-76
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
- Multi-Body Impact Motion with Friction—Analysis, Simulation, and Experimental ValidationJournal of Mechanical Design, 1993
- Mechanical design issues in laterally-driven microstructuresSensors and Actuators A: Physical, 1990
- Novel utrasonic motors with mono- and bimodal drivesSensors and Actuators A: Physical, 1990
- In situ friction and wear measurements in integrated polysilicon mechanismsSensors and Actuators A: Physical, 1990
- Electrostatically balanced comb drive for controlled levitation1990
- Resonant-structure Micromotors: Historical Perspective and AnalysisSensors and Actuators, 1989
- New type of piezoelectric ultrasonic motorIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1989
- Ultrasonic piezomotor with longitudinally oscillating amplitude-transforming resonatorIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1989
- Piezoelectric Ultrasonic Motor1987