Piezoelectric properties and poling effect of Pb(Zr, Ti)O3 thick films prepared for microactuators by aerosol deposition

Crack-free $[{\mathrm{Pb(Zr}}_{\mathrm{0.52}}{\mathrm{, Ti}}_{\mathrm{0.48}}{\mathrm{)O}}_{\mathrm{3}}]$ (PZT) films with more than 10 μm thickness as the piezoelectric material, were formed on stainless-steel (SUS304) and ${\mathrm{Pt/Ti/SiO}}_{\mathrm{2}}\mathrm{/Si}$ substrates by aerosol deposition and then annealed at 600 °C in air. The deposition rate was 20 μm/min in an area of $\text{5×5\hspace{0.05em}}{\mathrm{mm}}^{\mathrm{2}}.$ To estimate the piezoelectric and mechanical properties of PZT films, a unimorph structured PZT and a free-standing cantilever were fabricated. The Young’s modulus ${\mathrm{(Y}}_{11})$ of the PZT film was 80 GPa. Poling at 40 kV/cm, 250 °C for 20 min increased the properties by a factor of 4.0–5.5, resulting in the piezoelectric coefficient ${\mathrm{(-d}}_{31})$ varying from 80 to 180 pm/V.