Voltage-tunable terahertz metamaterial based on liquid crystal material for bandpass filters and phase shifters

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Abstract
In this paper, we proposed a voltage-tunable terahertz metamatrial, which is composed of the circular-ring deep-slot array fabricated by UV-LIGA process to form a controlled cavity embedded with the liquid crystal (LC). By changing the biased voltage, the transmission peak of the terahertz metamaterial can be continuously tuned within a frequency range of 38 GHz. Moreover, this metamaterial can work over a wide range of incident and polarization angle for both TE and TM waves due structure symmetry. In addition, a differential phase of 74° is obtained at 0.45 THz by tuning the biased voltage. Therefore, our results open new opportunities for the tunable THz bandpass filters and phase shifters.