Ultralow-loss, high-density SOI optical waveguide routing for macrochip interconnects
Authors:
- 11 May 2012
- journal article
- Published by Optica Publishing Group in Optics Express
- Vol. 20 (11) , 12035-12039
Abstract
We report optical waveguides up to one meter long with 0.026 dB/cm loss fabricated in a 300nm thick SOI CMOS process. Combined with tight bends and compact interlayer grating couplers, we demonstrate a complete toolbox for ultralow-loss, high-density waveguide routing for macrochip interconnects.Keywords
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