Atomic Structure of Ordered InGaP Crystals Grown on (001)GaAs Substrates by Metalorganic Chemical Vapor Deposition
Authors:
- Osamu UedaOUOsamu Ueda
- Masahiko TakikawaMTMasahiko Takikawa
- Junji KomenoJKJunji Komeno
- Itsuo UmebuIUItsuo Umebu
- 1 November 1987
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 26 (11A) , L1824-1827
Abstract
InGaP crystals grown on (001)GaAs substrates by metalorganic chemical vapor deposition are structurally evaluated by transmission electron microscopy. High-resolution electron microscopy observation and electron diffraction analysis of both the (110) and the (11̄0) cross-section specimens strongly suggest that ordering of column III atoms on only two sets of the (111) planes with doubling in periodicity of (111) layers, i.e., In/Ga/In/Ga/In/Ga. . ., is occurring in the crystal. The ordering of the crystal is not perfect, and the ordered regions are assumed to be plate-like microdomains.Keywords
This publication has 11 references indexed in Scilit:
- Evidence for the existence of an ordered state in Ga0.5In0.5P grown by metalorganic vapor phase epitaxy and its relation to band-gap energyApplied Physics Letters, 1987
- The effects of elastic relaxation on transmission electron microscopy studies of thinned composition-modulated materialsJournal of Vacuum Science & Technology B, 1986
- Ordered structures in GaAs0.5Sb0.5 alloys grown by organometallic vapor phase epitaxyApplied Physics Letters, 1986
- Observation of Order-Disorder Transitions in Strained-Semiconductor SystemsPhysical Review Letters, 1985
- On elastic relaxation and long wavelength microstructures in spinodally decomposed InxGa1−x.AsyP1−yepitaxial layersPhilosophical Magazine A, 1985
- Spinodal decomposition in InGaAsP epitaxial layersJournal of Crystal Growth, 1984
- Composition-Modulated Structures in InGaAsP and InGaP Liquid Phase Epitaxial Layers Grown on (001) GaAs SubstratesJapanese Journal of Applied Physics, 1984
- Alloy Clustering inCompound Semiconductors Grown by Molecular Beam EpitaxyPhysical Review Letters, 1982
- The problem of symmetry in statistical thermodynamics of substitutional and interstitial ordered solid solutionsPhysica Status Solidi (b), 1973
- Röntgenographische und elektrische Untersuchungen des CuPt‐SystemsAnnalen der Physik, 1937