Design and analysis of monolithic integrated MEMS vector hydrophone micro-array
Authors:
- Zhenzhen ShangZSZhenzhen Shang
- Guojun ZhangGZGuojun Zhang
- Wendong ZhangWZWendong Zhang
- Xiaoyong ZhangXZXiaoyong Zhang
- 9 February 2022
- journal article
- research article
- Published by Elsevier in Measurement
- Vol. 192
Abstract
No abstract availableKeywords
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