The adhesion strength and mechanical properties of SiC films deposited on SiAlON buffer layer by magnetron sputtering

Authors:
  • SSShumei Song
    Shumei Song
  • SCSheng-Chi Chen
    Sheng-Chi Chen
  • MDMingjiang Dai
    Mingjiang Dai
  • KWKunlun Wang
    Kunlun Wang
  • XZXiaoyan Zheng
    Xiaoyan Zheng
  • YLYingbo Lu
    Yingbo Lu
  • TYTianlin Yang
    Tianlin Yang
  • ZYZhen-Ming Yue
    Zhen-Ming Yue

Abstract
No abstract available
Funding Information
  • Shandong Province Natural Science Foundation (ZR2018QEM002)
  • Key Lab of Guangdong for Modern Surface Engineering Technology
  • Shandong Province (2018GGX102020)
  • National Natural Science Foundation of China (11504202)
  • Ministry of Science and Technology of Taiwan (103-2221-E-131-004)
  • Shandong University

This publication has 28 references indexed in Scilit: