Leveling of 200 nm Features by Organic Additives

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Abstract
The leveling of trenches by an acid‐copper electrolyte with polyethylene glycol (PEG), , bis(3-sulfopropyl) disulfide (SPS), and Janus Green B (JGB) was shown to be superior to leveling in electrolytes with combinations of only two or three of the additives. The leveling performance of an electrolyte with all four additives is dependent on both current density and JGB concentration. The leveling of the features appears to be consistent with some, but not all, aspects of previous experiments on a scale. ©1999 The Electrochemical Society