A Subnanosecond Masterslice LSI Using Dielectric Isolation and Three Layer Metallization Technologies
Authors:
- Tsunehachi IshitaniTITsunehachi Ishitani
- Hideo KodamaHKHideo Kodama
- Tsuneta SudoTSTsuneta Sudo
- 1 January 1978
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 17 (S1)