A database on electron‐solid interactions
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Abstract
Monte Carlo modeling of electron‐solid interactions requires a detailed and accurate supply of experimental data on which to base its physics and against which to test its predictions. To meet this need, a collection of data—comprising measurements of secondary and backscattered electron yields, electron stopping powers, and x‐ray ionization cross sections, as a function of energy—has been assembled from published sources. The quality and quantity of the compilation varies widely, with little or no data being available for the majority of elements in the periodic table, while results for complex materials of current technologic interest are also almost nonexistent. To meet the needs of Monte Carlo simulation in areas such as dimensional metrology or microanalysis, a program of systematic measurements is required.Keywords
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