Tactical grade MEMS accelerometer

Authors:

1 September 2017

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

p. 1-11
DOI:10.1109/inertialsensors.2017.8171495

Abstract

SAFRAN COLIBRYS introduce the MS1000 accelerometer, a new class of high performance MEMS accelerometer specially designed for inertial applications. It is based on Colibrys' long experience with MEMS technology and introduces an innovative design solution to meet tactical grade requirements. This paper introduces the MS1000 architecture, reviews in detail the key performances of the product, and presents qualification results.

Keywords

ACCELEROMETERS
MICROMECHANICAL DEVICES
TEMPERATURE SENSORS
TEMPERATURE MEASUREMENT
VIBRATIONS
LINEARITY

This publication has 2 references indexed in Scilit:

Open-loop and closed-loop high-end accelerometer platforms for high demanding applications
2016
RS9000, a novel MEMS accelerometer family for Mil/Aerospace and safety critical applications
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