Improved cantilever profiles for sensor elements
Authors:
- Sanchitha FernandoSFSanchitha Fernando
- Michael AustinMAMichael Austin
- Jason ChaffeyJCJason Chaffey
- 30 November 2007
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 40 (24) , 7652-7655
Abstract
No abstract availableKeywords
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