IC-processed electrostatic synchronous micromotors
Authors:
- Yu-Chong TaiYTYu-Chong Tai
- Richard S. MullerRMRichard S. Muller
- 1 November 1989
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 20 (1-2) , 49-55
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Design considerations for micromachined electric actuatorsSensors and Actuators, 1988
- Integrated movable micromechanical structures for sensors and actuatorsIEEE Transactions on Electron Devices, 1988
- Design considerations for a practical electrostatic micro-motorSensors and Actuators, 1987