A W-band Fully-Integrated Phased Array Based on the Organic HDI Substrate

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Abstract
A 64-elements W-band phased array based on the organic HDI substrate is designed for communication and radar applications. The flip-chip assembly process is used to improve module-level yield and minimize the package size. The designed array performs 4GHz operating bandwidth from 91 GHz to 95 GHz, 25 dBi gain at 93 GHz, and more than $25^{\circ}$ beam scanning range. The whole size of the full-integrated array is 17.5 mm $\times 17.5$ mm $\times 0.8$ mm. The proposed array is co-designed with antenna and RFIC to support a normal rectangular grid array to obtain good beam steering performance.