Simulation of efficient extreme ultraviolet light generation from a 4-μm-wavelength laser irradiating pre-formed targets

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Abstract
Optimizing extreme ultraviolet (EUV) conversion efficiency (CE) is a core yet challenging requirement for laser-produced plasma sources. This study demonstrates the specific effects of laser- and tin target conditions on hydrodynamic and radiation properties of the light source, leading to a laser–target co-optimization scheme toward achieving optimal CE. For laser–droplet interactions, peak CE at 4-μm laser wavelength stems from modified laser penetration depth and balanced in-band radiation emissivity and opacity. However, geometric losses and strong reflections of laser energy prevent global CE optimization. The rarefied and spatially extended target induced by the pre-pulse can expand the laser–target interaction region and enhance laser absorption, leading to a substantial improvement in CE. Moreover, shaped-target morphology critically modulates laser ablation dynamics and in-band radiation. Symmetric and uniform optimized targets can be achieved by adjusting the delay time of the dual-pulse, which can mitigate the in-band radiation emission anisotropy. Eventually, it is found that the stable and homogeneous heating of optimized targets can maximize the CE to 7.1% under 4-μm laser irradiation. This study demonstrates a promising approach to improve the light performance through mid-infrared laser driving and target morphology selection.
Funding Information
  • National Natural Science Foundation of China (12175309)
  • National Natural Science Foundation of China (12475252)
  • National Natural Science Foundation of China (12275356)
  • National Natural Science Foundation of China (12305259)
  • Strategic Priority Research Program of Chinese Academy of Science (XDA25050200)
  • Defense Industrial Technology Development Program (JCKYS2023212807)
  • Defense Industrial Technology Development Program (JCKYS2024212803)
  • Natural Science Foundation of Hunan Province (2025JJ20007)
  • Research Initiation Project of the National University of Defense Technology (202501-YJRC-XX-001)

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