System identification of a novel 6-DOF precision positioning table

This publication has 9 references indexed in Scilit:

• Input coupling analysis and optimal design of a 3-DOF compliant micro-positioning stage
  Mechanism and Machine Theory, 2008
• Investigation of a 3-DOF micro-positioning table for surface grinding
  International Journal of Mechanical Sciences, 2006
• A comparison of fitness functions for the identification of a piezoelectric hysteretic actuator based on the real-coded genetic algorithm
  Sensors and Actuators A: Physical, 2006
• Optimization of an impact drive mechanism based on real-coded genetic algorithm
  Sensors and Actuators A: Physical, 2005
• An ultra-precision XY/spl theta//sub Z/ piezo-micropositioner. I. Design and analysis
  IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1999
• An ultra-precision XY/spl Theta//sub Z/ piezo-micropositioner. II. Experiment and performance
  IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1999
• Genetic algorithms: concepts and applications [in engineering design]
  IEEE Transactions on Industrial Electronics, 1996
• Modeling of a three-layer piezoelectric bimorph beam with hysteresis
  Journal of Microelectromechanical Systems, 1995
• Method for Random Vibration of Hysteretic Systems
  Journal of the Engineering Mechanics Division, 1976