Collisional sheath dynamics
Authors:
- 15 May 1995
- journal article
- conference paper
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 77 (10) , 4967-4972
Abstract
Using a collisional fluid model, we investigate the dynamics of the collisional sheath following the application of a large, negative, finite-rise-time, voltage pulse to a planar target. For a moderate amount of collisionallity, we find that the ion impact energy decreases significantly, while the sheath width and ion flux (i.e., the ion current) are not greatly reduced. The theory shows fair agreement with experimental measurements.Keywords
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