An Experiment-Based Variable Compensation Method to Improve the Geometric Accuracy of Sub-mm Features Fabricated by Stereolithography (SLA)

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Abstract
In this paper, we present an experimental procedure to enhance the dimensional accuracy of fabrication via stereolithography (SLA) of features at the sub-mm scale. Deviations in sub-mm hemispherical cavity diameters were detected and measured on customized samples by confocal microscopy. The characterization and experimental observations of samples allowed the identification of inaccuracy sources, mainly due to the laser beam scanning strategy and the incomplete removal of uncured liquid resin in post-processing (i.e., IPA washing). As a technology baseline, the measured dimensional errors on cavity diameters were up to −46%. A compensation method was defined and implemented, resulting in relevant improvements in dimensional accuracy. However, measurements on sub-mm cavities having different sizes revealed that a constant compensation parameter (i.e., C = 85, 96, 120 μm) is not fully effective at the sub-mm scale, where average errors remain at −24%, −18.8%, and −16% for compensations equal to 85, 96 and 120 μm, respectively. A further experimental campaign allowed the identification of an effective nonlinear compensation law where the compensation parameter depends on the sub-mm feature size C = f(D). Results show a sharp improvement in dimensional accuracy on sub-mm cavity fabrication, with errors consistently below +8.2%. The proposed method can be extended for the fabrication of any sub-mm features without restrictions on the specific technology implementation.
Funding Information
  • European Union (PE00000001-RESTART, PE00000004-MICS)
  • European Commission (PE00000001-RESTART, PE00000004-MICS)

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