Doppler writing and linewidth control for scanning beam interference lithography
- 1 November 2005
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
- Vol. 23 (6) , 2640-2645
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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