High resolution blue laser mastering with inorganic photoresist
Authors:
- 25 June 2003
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
An inexpensive and practical mastering technology was developed by using blue laser optics of 405 nm in wavelength /spl lambda/ and NA=0.95 with an inorganic photoresist. The resist system showed a higher resolution for successful 130 nm pit patterning than that of ordinary organic photoresist systems. Based on this technology, a ROM disc with a recording capacity of 25 GB on a 120 mm diameter surface was mastered at a fast recording speed of 4.92 m/s. The disc showed a reasonable jitter value of 9.3% and a push-pull signal by using conventional readout optics of /spl lambda/=405 nm and NA=0.85.Keywords
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