Dimensional changes of Al2O3, MgO, MgAl2O4, AlN and Si3N4 by helium implantation
Authors:
- 2 May 2000
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 166-167, 165-170
Abstract
No abstract availableKeywords
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