Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies
Authors:
- Z.Lj. PetrovićZPZ.Lj. Petrović
- Z.M. RaspopovićZRZ.M. Raspopović
- V.D. StojanovićVSV.D. Stojanović
- J.V. JovanovićJJJ.V. Jovanović
- G. MalovićGMG. Malović
- T. MakabeTMT. Makabe
- J. de UrquijoJUJ. de Urquijo
- 1 June 2007
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 253 (16) , 6619-6640
Abstract
No abstract availableKeywords
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