Quantitative XPS: The calibration of spectrometer intensity—energy response functions. 1—The establishment of reference procedures and instrument behaviour

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Abstract
The ASTM E‐42 committee round robin on XPS measurements found, in a simple survey, that the intensity‐energy response of electron spectrometers was unacceptably unreliable. In this paper new, high accuracy, reference procedures are developed to define the relative intensity‐energy response function of spectrometers, for the constant Δ E and Δ E / E modes, for analysts to calibrate their own instruments. Two procedures are developed, one involving the measurement of peak areas, for Cu, Ag and Au, carefully specified to reduce the effects of measurement noise, and the second, for use on well‐designed spectrometers, through the measurement of the spectrum background. The measurements on Cu, Ag and Au reference foils show that intensity ratios are reproducible to within 2% standard deviation and, from preliminary tests, that the ratio of the response functions of a VG Scientific ESCALAB I and the NPL ESCA 3 Mk II is proportional to E 0.094 , except for the low pass energy of 20 eV in the ESCALAB I where the proportionality changes to E −0.156 . Similarly the ratio of the functions for a Perkin‐Elmer PHI 550 and the VG Scientific ESCA 3 Mk II is proportional to E −0.244 over the normal XPS measurement range to an accuracy of 2%.

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