Manufacturing of 3D structures for micro-tools using laser ablation
Authors:
- Peter HeylPHPeter Heyl
- Thomas OlschewskiTOThomas Olschewski
- Roelof W. WijnaendtsRWRoelof W. Wijnaendts
- 1 September 2001
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 57-58, 775-780