Substrate temperature dependence of structure and resistivity of SrRuO3 thin films grown by pulsed laser deposition on (100) SrTiO3
Authors:
- 1 November 1999
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 14 (11) , 4385-4394
Abstract
The resistivity of SrRuO3 thin films on (001) SrTiO3 substrates grown at different temperatures by pulsed laser deposition is correlated to the microstructure. Films grown at 775 °C are of an orthorhombic structure, contain very few defects, and exhibit a low resistivity of 150 μΩ cm. Films grown at other temperatures contain a cubic phase and show higher resistivities. The defects present in the films, particularly twins and antiphase boundaries, are analyzed by high-resolution transmission electron microscopy, and their origin, as well as influence on film resistivity, is discussed.Keywords
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