Determining the elastic modulus and hardness of an ultra-thin film on a substrate using nanoindentation
- 1 March 2009
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 24 (3) , 1114-1126
Abstract
A data analysis procedure has been developed to estimate the contact area in an elasto-plastic indentation of a thin film bonded to a substrate. The procedure can be used to derive the elastic modulus and hardness of the film from the indentation load, displacement, and contact stiffness data at indentation depths that are a significant fraction of the film thickness. The analysis is based on Yu's elastic solution for the contact of a rigid conical punch on a layered half-space and uses an approach similar to the Oliver-Pharr method for bulk materials. The methodology is demonstrated for both compliant films on stiff substrates and the reverse combination and shows improved accuracy over previous methods.Keywords
This publication has 29 references indexed in Scilit:
- Determining hardness of thin films in elastically mismatched film-on-substrate systems using nanoindentationActa Materialia, 2006
- Plane-strain Bulge Test for Thin FilmsJournal of Materials Research, 2005
- Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodologyJournal of Materials Research, 2004
- Indentation of a soft metal film on a hard substrate: strain gradient hardening effectsJournal of the Mechanics and Physics of Solids, 2001
- A new bulge test technique for the determination of Young's modulus and Poisson's ratio of thin filmsJournal of Materials Research, 1992
- The determination of film hardness from the composite response of film and substrate to nanometer scale indentationsJournal of Materials Research, 1992
- An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experimentsJournal of Materials Research, 1992
- On the generality of the relationship among contact stiffness, contact area, and elastic modulus during indentationJournal of Materials Research, 1992
- The relation between load and penetration in the axisymmetric boussinesq problem for a punch of arbitrary profileInternational Journal of Engineering Science, 1965
- The elastic stresses produced by the indentation of the plane surface of a semi-infinite elastic solid by a rigid punchMathematical Proceedings of the Cambridge Philosophical Society, 1945