Method for polymer hot embossing process development
Authors:
- 19 May 2006
- journal article
- Published by Springer Nature in Microsystem Technologies
- Vol. 13 (3-4) , 265-270
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
- Low-cost thermoforming of micro fluidic analysis chipsJournal of Micromechanics and Microengineering, 2002
- Polymer microfabrication technologiesMicrosystem Technologies, 2002
- Hot embossing in microfabrication. Part II: Rheological characterization and process analysisPolymer Engineering & Science, 2002
- Hot embossing in microfabrication. Part I: ExperimentalPolymer Engineering & Science, 2002
- Fabrication of plastic microchips by hot embossingLab on a Chip, 2002
- Microfabrication of single-use plastic microfluidic devices for high-throughput screening and DNA analysisMicrosystem Technologies, 2002
- Nanofabrication using hot embossing lithography and electroformingMicroelectronic Engineering, 2001
- Pattern formation in hot embossing of thin polymer filmsNanotechnology, 2001
- Nanoreplication in polymers using hot embossing and injection moldingMicroelectronic Engineering, 2000
- Fabrication of LIGA mold insertsMicrosystem Technologies, 1998