A lateral RF MEMS capacitive switch utilizing parylene as dielectric
Authors:
- 17 November 2011
- journal article
- research article
- Published by Springer Nature in Microsystem Technologies
- Vol. 18 (1) , 77-85
Abstract
No abstract availableKeywords
This publication has 20 references indexed in Scilit:
- A parylene-filled-trench technique for thermal isolation in silicon-based microdevicesJournal of Micromechanics and Microengineering, 2009
- A low-loss, single-pole, four-throw RF MEMS switch driven by a double stop comb driveJournal of Micromechanics and Microengineering, 2009
- A Non-Contact-Type RF MEMS Switch for 24-GHz Radar ApplicationsJournal of Microelectromechanical Systems, 2009
- Loss characteristics of silicon substrate with different resistivitiesMicrowave and Optical Technology Letters, 2006
- Laterally-Driven Silicon RF Micro-Switch with High IsolationJapanese Journal of Applied Physics, 2006
- Low-loss lateral micromachined switches for high frequency applicationsJournal of Micromechanics and Microengineering, 2004
- RF MEMS switches and switch circuitsIEEE Microwave Magazine, 2001
- Bulk micromachined relay with lateral contactJournal of Micromechanics and Microengineering, 2000
- Comparison of lateral and vertical switches for application as microrelaysJournal of Micromechanics and Microengineering, 1999
- Lateral polysilicon microrelays with a mercury microdrop contactIEEE Transactions on Industrial Electronics, 1998