Stoichiometry Determination of Chalcogenide Superlattices by Means of X‐Ray Diffraction and its Limits
- 22 February 2019
- journal article
- research article
- Published by Wiley in Physica Status Solidi (RRL) – Rapid Research Letters
- Vol. 13 (4)
Abstract
In this paper, the potential of stoichiometry determination for chalcogenide superlattices, promising candidates for next‐generation phase‐change memory, via X‐ray diffraction is explored. To this end, a set of epitaxial GeTe/Sb2Te3 superlattice samples with varying layer thicknesses is sputter deposited. Kinematical scattering theory is employed to link the average composition with the diffraction features. The observed lattice constants of the superlattice reference unit cell follow Vegard's law, enabling a straight‐forward and non‐destructive stoichiometry determination.Keywords
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Funding Information
- DFG
- FP7 program, European Union
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