Sputter Synthesis of Ba2YCu3Oy As-Deposited Superconducting Thin Films from Stoichiometric Target–A Mechanism of Compositional Deviation and Its Control
Authors:
- Norio TeradaNTNorio Terada
- Hideo IharaHIHideo Ihara
- Masatoshi JoMJMasatoshi Jo
- Masayuki HirabayashiMHMasayuki Hirabayashi
- Yoichi KimuraYKYoichi Kimura
- Katsuhiro MatsutaniKMKatsuhiro Matsutani
- Kazuo HirataKHKazuo Hirata
- Eizo OhnoEOEizo Ohno
- 1 April 1988
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 27 (4A) , L639
Abstract
A mechanism of compositional deviation of Ba-Y-Cu-O films during sputtering has been investigated, and a process for obtaining as-deposited superconducting films from a stoichiometric target has been developed. The main factor of the deviation is the radiation of high-energy electrons emitted from the oxide target with a low work function onto the growing surface. By eliminating the electron bombardment, films with the same composition were obtained reproducibly. As-grown films 4000 Å thick deposited at 580°C showed T c ( ρ=0) of 82.5 K and an excellent surface smoothness.Keywords
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