A reduced-size silicon micromachined high-Q resonator at 5.7 GHz
Authors:
- R.M. HendersonRHR.M. Henderson
- J. PapapolymerouJPJ. Papapolymerou
- 10 December 2002
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Microwave Theory and Techniques
- Vol. 50 (10) , 2305-2314
Abstract
This paper depicts the progress toward a novel high-quality-factor miniaturized resonator operating in the 5.6-5.8-GHz range. The design of the resonator is based on a micromachined cavity loaded with a high dielectric-constant material. Energy is coupled into the cavity from input and output microstrip lines via slots. Quality factors up to 640 are demonstrated on silicon planar structures with a volume of 177 mm/sup 3/. Further size reduction yields a volume of 24.5 mm/sup 3/ and quality factors ranging from 152 to 197, while keeping the resonator integration ability. Bonding techniques and the dielectric loss of the loading material are proven to be the limiting factors in achieving higher quality factors.Keywords
This publication has 11 references indexed in Scilit:
- Design and realization of high Q millimeter-wave structures through micromachining techniques2003
- SAW impedance element filters towards 5 GHz2002
- Low loss micromachined filters for millimeter-wave telecommunication systems2002
- Ba(Co,Nb)O/sub 3/-based ceramics for super high frequency dielectric filter2002
- A miniaturized ceramic bandpass filter for cordless phone systems2002
- Miniaturization and advanced functionalities of SAW devicesIEEE Transactions on Microwave Theory and Techniques, 2001
- Design, fabrication, and application of precise SAW delay lines used in an FMCW radar systemIEEE Transactions on Microwave Theory and Techniques, 2001
- A Hybrid Micromachined High -Q Cavity Resonator at 5.8 GHz2000
- The effects of slot positioning on the bandwidth of a micromachined resonator1998
- A micromachined high-Q X-band resonatorIEEE Microwave and Guided Wave Letters, 1997