Etching processes of transferred and non-transferred multi-layer graphene in the presence of extreme UV, H2O and H2
Authors:
- B.K. MundBMB.K. Mund
- J.M. SturmJSJ.M. Sturm
- W.T.E. van Den BeldW.T.E. van Den Beld
- C.J. LeeC.J. Lee
- F. BijkerkFBF. Bijkerk
Open Access
- 1 February 2020
- journal article
- research article
- Published by Elsevier in Applied Surface Science
- Vol. 504
Abstract
No abstract availableKeywords
Funding Information
- Overijssel Province
- Netherlands Organisation for Scientific Research
- ASML Holding NV
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