Boron carbide films grown from microwave plasma chemical vapor deposition
Authors:
- Kyu-Wang LeeKLKyu-Wang Lee
- Stephen J. HarrisSHStephen J. Harris
- 1 October 1998
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 7 (10) , 1539-1543
Abstract
No abstract availableKeywords
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